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EPI DIVISION
300mm
200mm
EQUIPMENT
PARTS
AMAT CENTURA
ASM EPSILON
LPE
ETC.
CVD DIVISION
LED DIVISION
PRODUCTEPI DIVISION > 200MM > PARTS > AMAT CENTURA
ASSEMBLY, MAG COUPLED ROTATION, 200MM HT

SILT VALVE

PROCESS CHAMBER ASS’Y

BLOWER 200/208/3 50-60 3 HP MOTOR 60 HZ

CLAMP RING

DISC, ADJUSTMENT RETAINER

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