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CVD DIVISION
300mm
200mm
EQUIPMENT
PARTS
WJ
NOVELLUS
AMAT
ETC.
EPI DIVISION
LED DIVISION
PRODUCTCVD DIVISION > 200MM > PARTS > NOVELLUS
LOWER SPINDLE INDEX ASSEMBLY

MAGNETIC SEAL

DEGAS MODULE

HEATER ISOLATOR MODIFY

PORT LFC (OLD TYPE)

PORT LFC (NEW TYPE)

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